| 1. Identity statement | ||||
| Reference Type | Conference Paper (Conference Proceedings) | |||
| Site | mtc-m21c.sid.inpe.br | |||
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S | |||
| Identifier | 8JMKD3MGP3W34R/3TC2LTB | |||
| Repository | sid.inpe.br/mtc-m21c/2019/05.24.14.03 | |||
| Metadata Repository | sid.inpe.br/mtc-m21c/2019/05.24.14.03.19 | |||
| Metadata Last Update | 2020:01.06.11.42.14 (UTC) administrator | |||
| Secondary Key | INPE--PRE/ | |||
| Citation Key | Trava-AiroldiNaCoFuRaCa:2019:InArIg | |||
| Title | Influence of the argon as an ignitor and an agent on DLC properties growth at pressure as low as 3 x 10-4 mbar by modified pulsed-DC PECVD method  | |||
| Year | 2019 | |||
| Access Date | 2024, May 28 | |||
| Secondary Type | PRE CI | |||
| 2. Context | ||||
| Author | 1 Trava-Airoldi, Vladimir Jesus 2 Nass, Karina Carvalho de Farias 3 Corat, Evaldo José 4 Fukumasu, N. 5 Ramirez, M. 6 Capote, G. | |||
| Resume Identifier | 1 2 3 8JMKD3MGP5W/3C9JH33 | |||
| Group | 1 LABAS-COCTE-INPE-MCTIC-GOV-BR 2 LABAS-COCTE-INPE-MCTIC-GOV-BR 3 LABAS-COCTE-INPE-MCTIC-GOV-BR | |||
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Universidade de São Paulo (USP) 5 Universidade do Vale do Paraíba (UNIVAP) 6 Universida Nacional de Bogota | |||
| Author e-Mail Address | 1 vladimir.airoldi@inpe.br 2 karina.nass@inpe.br 3 evaldo.corat@inpe.br | |||
| Conference Name | International Conference on Metallurgical Coatings and Thin Films (ICMCTF), 46 | |||
| Conference Location | San Diego, CA | |||
| Date | 19-24 May | |||
| History (UTC) | 2019-05-24 14:16:23 :: simone -> administrator :: 2019 2020-01-06 11:42:14 :: administrator -> simone :: 2019 | |||
| 3. Content and structure | ||||
| Is the master or a copy? | is the master | |||
| Content Stage | completed | |||
| Transferable | 1 | |||
| Content Type | External Contribution | |||
| Keywords | DLC films DC pulsed PECVD additional cathode argon ignitor mechanical and trybological properties | |||
| Abstract | As reported for many years, hydrogenated DLC films (a-C:H) have been a choice of a protective coatings for many applications due to their set of superior mechanical, chemical, tribological and biological properties such as: high hardness, high wear resistance, low coefficient of friction, high chemical inertness, good biocompatibility, bactericide, etc.. However, in order to improve the adhesion between the DLC and the different metals substrates a huge modification of a Pulsed DC PECVD technique has been obtained introducing an additional cathode working as electron and ion confinement. With these modifications pressure as low as 10-3 mbar allow operating in collisionless regime improving not only the adhesion but also a set of DLC proprieties cited above. So, in this work we present studies concerning more improvement properties of the DLC films as a function of confinement of electrons and ions parameters in a plasma discharge by using argon as an ignitor gas for the interlayer precursor and keeping it during all the process of DLC deposition. In this case the best conditions of collisonless operation was reached at pressure as low as 3.10-4 mbar. Basically, due to the condition of operating in very low pressure, this technique allows to grow the DLC film with very good uniformity and higher hardness, higher adhesion, lower coefficient of friction, less porosity and, also, provide to be able to get a DLC deposition in the form of multilayer, like thicker films, promoting less residual stress. So, studies at the first time, of DLC with superior properties has been carried out from PECVD technique. More specifically, studies of the DLC film properties as a function of the argon buffer gas density and as a function of bias voltage has been done. Raman scattering spectroscopy, Rockwell indentation, nano indentation, FEG, and trybological analyses are discussed. Also, the operating parameters of this modified PECVD system are well controlled, so that a scaling up studies will also be presented as an important part of this work. | |||
| Area | FISMAT | |||
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Influence of the... | |||
| doc Directory Content | there are no files | |||
| source Directory Content | there are no files | |||
| agreement Directory Content |
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| 4. Conditions of access and use | ||||
| Language | en | |||
| User Group | simone | |||
| Reader Group | administrator simone | |||
| Visibility | shown | |||
| Update Permission | not transferred | |||
| 5. Allied materials | ||||
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 | |||
| Host Collection | urlib.net/www/2017/11.22.19.04 | |||
| 6. Notes | ||||
| Empty Fields | archivingpolicy archivist booktitle callnumber copyholder copyright creatorhistory descriptionlevel dissemination doi e-mailaddress edition editor format isbn issn label lineage mark mirrorrepository nextedition notes numberoffiles numberofvolumes orcid organization pages parameterlist parentrepositories previousedition previouslowerunit progress project publisher publisheraddress readpermission rightsholder schedulinginformation secondarydate secondarymark serieseditor session shorttitle size sponsor subject targetfile tertiarymark tertiarytype type url versiontype volume | |||
| 7. Description control | ||||
| e-Mail (login) | simone | |||
| update | ||||